Updated Aug 21, 2026 · Public platform & industry data

Aug 21, 2026 Updated

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2026 Top 10 Plasma Etching Machine Manufacturers in China

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Top-rated Plasma Etching Machine suppliers, How to choose a Plasma Etching Machine manufacturer, Best Plasma Etching Machine companies in China

The top 10 Plasma Etching Machine manufacturers in China for 2026 are: Huayixing (Beijing) Technology Co., Ltd, Beijing Oubeier Scientific Instrument Co., Ltd, Chengdu Chaomai Optoelectronics Technology Co., Ltd, Shanghai Peiyuan Instrument Equipment Co., Ltd, Shanghai Maohong Plasma Technology Co., Ltd, Shandong Chuangshi Weina Technology Co., Ltd, Shenzhen Zhenhua Plasma Intelligent Manufacturing Co., Ltd, Guangzhou Shanzhun Technology Co., Ltd, Suzhou Shaxin Technology Co., Ltd, Kunshan Pulesi Electronic Technology Co., Ltd. Ranked based on product relevance, certifications, company activity, and industry performance. This list is widely used for supplier comparison and sourcing decisions.

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Top 1
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Huayixing (Beijing) Technology Co., Ltd
Overall Score4.9 / 5
Est. Date2014-02-24
Registered Capital10050K CNY

Huayixing (Beijing) Technology Co., Ltd., with its registered address at Room 301, 3rd Floor, No. 7 Kexing Road, Fengtai District, Beijing (Industrial Park), registered with the Market Supervision Administration of Fengtai District, Beijing, and represented by Li Yuhong as its legal representative. Its business scope includes technology development, technology consulting, and technology services; Selling instruments and meters, chemical products (excluding hazardous chemicals), glass products, teaching equipment, office equipment, electronic products, hardware and electrical equipment, computer software and hardware; Repair instruments and meters; Import and export of goods. (Market entities shall independently choose their business projects and carry out business activities in accordance with the law; for projects that require approval by law, they shall carry out business activities in accordance with the approved content after approval by relevant departments; they shall not engage in business activities prohibited or restricted by national and local industrial policies.). Core products: Plasma Etching Machine, , Multi Functional Constant Temperature Electric Heating Plate

Top 2
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Beijing Oubeier Scientific Instrument Co., Ltd
Overall Score4.7 / 5
Est. Date2004-01-07
Registered Capital12180K CNY

Beijing Oubeier Scientific Instrument Co., Ltd., registered at 1245, 12th floor, Building A, East District, Qinghe Jiayuan, Haidian District, Beijing, registered with the Market Supervision Administration of Haidian District, Beijing, with Hu Chunyan as the legal representative. Its business scope includes the sale of teaching instruments, Class I and II medical devices, chemical products (excluding hazardous chemicals and Class I precursor chemicals), cultural goods, building materials, decorative materials, hardware and electrical equipment, electronic products, mechanical equipment, communication equipment, sports equipment, computers, software, and auxiliary equipment; Development, promotion, transfer, and consulting of computer software technology; Technical testing; Conference services; Import and export of goods; Technology import and export; Agent import and export; Selling Class III medical devices. (Market entities shall independently choose their business projects and carry out business activities in accordance with the law; sell Class III medical devices and projects that require approval by law, and carry out business activities in accordance with the approved content after approval by relevant departments; they shall not engage in business activities prohibited or restricted by national and local industrial policies.). Core products: Plasma Etching Machine, Nanoindenter, Electron Paramagnetic

Top 3
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Chengdu Chaomai Optoelectronics Technology Co., Ltd
Overall Score4.7 / 5
Est. Date2014-09-18
Registered Capital50000K CNY

Chengdu Chaomai Optoelectronic Technology Co., Ltd., with its registered address at No. 503, 5th Floor, Building 4, No. 1024 South 1st Road, Chengdu Economic and Technological Development Zone (Longquanyi District), Sichuan Province, China. The registered authority is the Market Supervision and Administration Bureau of Longquanyi District, Chengdu City, and the legal representative is Zhang Songlin. The company's business scope includes research and development, manufacturing, and sales of pumps and vacuum equipment, electronic industry special equipment, electronic vacuum devices, industrial automatic control system devices, optoelectronic components and other electronic components, scales, optical instruments, optical glass, special ceramic products, glass, ceramic and enamel production special equipment, environmental protection equipment, photovoltaic equipment and devices, experimental machines, teaching special instruments, and other special equipment; Sales: Building materials, hardware and electrical equipment, cultural supplies; Computer software development; Import and export business of goods and technology; Engineering and technical research and experimental development [Projects that require approval by law can only be carried out after approval by relevant departments; business activities cannot be carried out without obtaining relevant administrative licenses (approvals)].. Core products: Plasma Etching Machine, Vacuum Furnace, Vacuum Cabinet

TOP4
Shanghai Peiyuan Instrument Equipment Co., Ltd
Overall Score4.6 / 5
Est. Date2013-09-27
Registered Capital1000K CNY

Shanghai Peiyuan Instrument Equipment Co., Ltd., with its registered address at 3rd Floor, Building 1, No. 368 Xiaonan Road, Fengxian District, Shanghai, is registered with the Market Supervision Administration of Fengxian District. The legal representative is Kong Xudong, and the business scope includes technical consulting, development, and services in the field of instrument equipment, laboratory equipment and consumables, electronic products, electromechanical equipment, household appliances, computer software and hardware (except for computer information system security products), office supplies, daily necessities, chemical raw materials and products (except for hazardous chemicals, monitored chemicals, fireworks and firecrackers, civilian explosives, and precursor chemicals) wholesale and retail, and business information consulting. Projects that require approval by law must be approved by relevant departments before conducting business activities. Core products: Plasma Etching Machine, , Semiconductor Chip

TOP5
Shanghai Maohong Plasma Technology Co., Ltd
Overall Score4.6 / 5
Est. Date2014-05-20
Registered Capital500K CNY

Shanghai Maohong Plasma Technology Co., Ltd., registered at Building 3, 1st Floor, Area A, No. 55, Lane 355, Shengxin South Road, Jiading District, Shanghai. The registration authority is Jiading District Market Supervision Administration, and the legal representative is Zhou Zhaowen. The business scope includes general projects such as technical services, technology development, technology consulting, technology exchange, technology transfer, and technology promotion; General equipment manufacturing (excluding special equipment manufacturing); Mechanical equipment research and development; Installation services for ordinary mechanical equipment; General equipment repair; Specialized equipment repair; Electronic product sales; Sales of mechanical equipment; Sales of metal products; Retail of hardware products; Wholesale of hardware products; Retail of computer software, hardware, and auxiliary equipment; Wholesale of computer software, hardware, and auxiliary equipment; Sales of chemical products (excluding licensed chemical products); Conference and exhibition services; Information consulting services (excluding licensed information consulting services); Advertising design and agency; Advertising production; Import and export of goods; Technology import and export. (Except for projects that require approval according to law, conduct business activities independently based on the business license in accordance with the law). Core products: Plasma Etching Machine, Direct Injection Plasma Equipment, Polymer Plasma Machine

TOP6
Shandong Chuangshi Weina Technology Co., Ltd
Overall Score4.5 / 5
Est. Date2008-09-04
Registered Capital11532.203K CNY

Shandong Chuangshi Weina Technology Co., Ltd., registered at No. 70, Yichasi Street, Daming Lake Street, Lixia District, Jinan City, Shandong Province, China (with multiple addresses), registered with the Market Supervision and Administration Bureau of Lixia District, Jinan City, with Sun Chuanfeng as the legal representative. Its business scope includes general projects: manufacturing of specialized equipment for semiconductor devices; Sales of specialized equipment for semiconductor devices; Manufacturing of pumps and vacuum equipment; Sales of pumps and vacuum equipment; Technical services, technology development, technology consulting, technology exchange, technology transfer, and technology promotion; Retail of computer software, hardware, and auxiliary equipment; Sales of instruments and meters. (Except for projects that require approval according to law, conduct business activities independently based on the business license in accordance with the law). Core products: Plasma Etching Machine, Ion Beam Tuning Equipment, Ion Beam Etching Machine

TOP7
Shenzhen Zhenhua Plasma Intelligent Manufacturing Co., Ltd
Overall Score4.5 / 5
Est. Date2018-12-07
Registered Capital20000K CNY

Shenzhen Zhenhua Plasma Intelligent Manufacturing Co., Ltd., registered at 208, Building A, Baitong Technology Innovation Industrial Park, Houting Community, Shajing Street, Bao'an District, Shenzhen, registered with the Shenzhen Municipal Administration for Market Regulation, with Sun Xiangyin as the legal representative. Its business scope includes the sale of instruments and meters; Sales of industrial automatic control system devices; Sales of specialized equipment for semiconductor devices; Manufacturing of other general instruments; Manufacturing of electronic specialized equipment; Sales of electronic specialized equipment; Mechanical equipment leasing; Domestic trade agency; Import and export agency. Sales of mechanical equipment; Software sales; Software development; General equipment manufacturing (excluding special equipment manufacturing); Maintenance of electronic and mechanical equipment (excluding special equipment); Technical services, technology development, technology consulting, technology exchange, technology transfer, and technology promotion. (Except for projects that require approval according to law, independently carry out business activities based on the business license) Manufacturing of specialized equipment for semiconductor devices; Industrial robot manufacturing; Manufacturing of industrial automatic control system devices; Manufacturing of electronic components and electromechanical equipment; Specialized equipment manufacturing (excluding licensed specialized equipment manufacturing). (For projects that require approval by law, business activities can only be carried out after approval by relevant departments. The specific business projects shall be subject to the approval documents or licenses issued by the relevant departments.). Core products: Plasma Etching Machine, Atmospheric Pressure Plasma Cleaning Machine, Automatic Plasma Cleaning Machine

TOP8
Guangzhou Shanzhun Technology Co., Ltd
Overall Score4.5 / 5
Est. Date2014-12-10
Registered Capital10000K CNY

Guangzhou Shanzhun Technology Co., Ltd., registered at 5A19, 5th floor, No. 1168-1198 Jiangnan Avenue South, Haizhu District, Guangzhou (even numbers) (for office use only), registered with the Market Supervision Administration of Haizhu District, Guangzhou, with Zou Tingting as the legal representative. Its business scope includes research and development of mechanical equipment; Research and development of new material technology; Sales of experimental analytical instruments; Engineering and technical research and experimental development; Promotion services for new material technology; Electrical equipment repair; Research and development of metal products; Technical services, technology development, technology consulting, technology exchange, technology transfer, and technology promotion; General equipment repair; Research and development of bio based material polymerization technology; Research and development of hardware products; Technology intermediary services; Medical research and experimental development; Manufacturing of experimental analytical instruments; Wholesale of computer software, hardware, and auxiliary equipment; Sales of industrial control computers and systems; Sales of Class I medical devices; Sales of Class II medical devices; General equipment manufacturing (excluding special equipment manufacturing); 3D printing services; Sales of electrical equipment; Sales of specialized chemical products (excluding hazardous chemicals); Sales of functional glass and new optical materials; Sales of surface functional materials; Sales of metal based composite materials and ceramic based composite materials; Sales of biobased materials; Manufacturing of electronic vacuum devices; Sales of metal materials; Sales of pumps and vacuum equipment; Sales of electronic vacuum devices;. Core products: Plasma Etching Machine, Rotating Plasma Low-Temperature Ashing Instrument, Fully Automatic Plasma Cleaning Machine

TOP9
Suzhou Shaxin Technology Co., Ltd
Overall Score4.3 / 5
Est. Date2022-10-19
Registered Capital2000K CNY

Suzhou Shaxin Technology Co., Ltd., registered at Room 331-332, Building A, No.1 Guotai North Road, Yangshe Town, Zhangjiagang City, Suzhou City, Jiangsu Province, registered with Zhangjiagang Data Bureau, with Jiang Fuping as the legal representative. Its business scope includes general projects such as technical services, technology development, technology consulting, technology exchange, technology transfer, and technology promotion; Sales of specialized equipment for semiconductor devices; Sales of electronic specialized equipment; Sales of experimental analytical instruments (except for projects that require approval according to law, conducting business activities independently with a business license in accordance with the law). Core products: Plasma Etching Machine, Pre Wetted Glue Removal And Back Washing Machine, Double Arm Homogenizer Developing Machine

TOP10
Kunshan Pulesi Electronic Technology Co., Ltd
Overall Score4.3 / 5
Est. Date2010-11-05
Registered Capital8000K CNY

Kunshan Pulesi Electronic Technology Co., Ltd., with its registered address at No. 298 Dongsheng Road, Bacheng Town, Kunshan City, is located on the first floor of Building 3. The registered authority is Kunshan Data Bureau, and the legal representative is Guo Feng. Its business scope includes research and development, manufacturing, sales, and maintenance services of plasma equipment and processing system equipment, electromechanical equipment, industrial automation equipment and accessories, instruments and meters, semiconductor equipment and accessories, ultrasonic equipment, laser equipment, robot equipment, water treatment equipment and accessories, mechanical equipment and accessories; Development and technical services for plasma surface treatment solutions; Technology development, technology transfer, technology consulting, and technology services in the fields of information technology, Internet of Things technology, computer technology, and network technology; Sales of optoelectronic products, electronic products and components, hardware and electrical equipment, metal materials, and optoelectronic materials; Rental of self owned equipment; Computer software development and sales; Import and export business of goods and technology. (For projects that require approval by law, business activities can only be carried out after approval by relevant departments). Core products: Plasma Etching Machine, Atmospheric Plasma Cleaning Machine, Plasma Accessories

Detailed Manufacturer Comparison

ManufacturerEst. DateMain ProductsRegistered CapitalCustomization
Huayixing (Beijing) Technology Co., Ltd2014-02-24Plasma Etching Machine, , Multi Functional Constant Temperature Electric Heating Plate10050K CNYNot Supported
Beijing Oubeier Scientific Instrument Co., Ltd2004-01-07Plasma Etching Machine, Nanoindenter, Electron Paramagnetic12180K CNYNot Supported
Chengdu Chaomai Optoelectronics Technology Co., Ltd2014-09-18Plasma Etching Machine, Vacuum Furnace, Vacuum Cabinet50000K CNYSupported
Shanghai Peiyuan Instrument Equipment Co., Ltd2013-09-27Plasma Etching Machine, , Semiconductor Chip1000K CNYNot Supported
Shanghai Maohong Plasma Technology Co., Ltd2014-05-20Plasma Etching Machine, Direct Injection Plasma Equipment, Polymer Plasma Machine500K CNYSupported
Shandong Chuangshi Weina Technology Co., Ltd2008-09-04Plasma Etching Machine, Ion Beam Tuning Equipment, Ion Beam Etching Machine11532.203K CNYNot Supported
Shenzhen Zhenhua Plasma Intelligent Manufacturing Co., Ltd2018-12-07Plasma Etching Machine, Atmospheric Pressure Plasma Cleaning Machine, Automatic Plasma Cleaning Machine20000K CNYNot Supported
Guangzhou Shanzhun Technology Co., Ltd2014-12-10Plasma Etching Machine, Rotating Plasma Low-Temperature Ashing Instrument, Fully Automatic Plasma Cleaning Machine10000K CNYNot Supported
Suzhou Shaxin Technology Co., Ltd2022-10-19Plasma Etching Machine, Pre Wetted Glue Removal And Back Washing Machine, Double Arm Homogenizer Developing Machine2000K CNYNot Supported
Kunshan Pulesi Electronic Technology Co., Ltd2010-11-05Plasma Etching Machine, Atmospheric Plasma Cleaning Machine, Plasma Accessories8000K CNYNot Supported

Purchasing Guide

Based on real user feedback, we provide the following suggestions:

  • For procurement requirements that require the use of plasma etching machines, it is recommended to prioritize checking key technical parameters such as etching accuracy and uniformity to ensure that the equipment can meet the micro nano processing requirements of wafers or specific materials.
  • When selecting suppliers, reference can be made to indicators such as product compatibility, business qualifications, enterprise activity, industry performance, and industry data support. Such enterprises can usually provide more stable equipment supply and technical support.
  • Plasma etching machines are widely used in semiconductor manufacturing and MEMS device processing. When purchasing, it is necessary to select suitable machine configurations based on specific scenarios such as silicon etching or dielectric etching.
  • Devices with different power and reaction chamber designs are suitable for different production scales. Modular models can be selected for small and medium-sized R&D scenarios, while the stability of high-throughput models needs to be considered for mass production lines.

Knowledge Base

Q

This article provides the key points for purchasing plasma etching machines, covering core parameter analysis, process matching suggestions, and maintenance precautions, to help readers choose suitable equipment based on actual needs and avoid common misunderstandings.

Q

This article provides a detailed introduction to the applications of plasma etching machines in semiconductor manufacturing, microelectronics processing, and materials science. It analyzes their working principles and technical advantages in different scenarios, helping readers to fully understand the multifunctionality of this key equipment.

Q

Vacuum plasma etching machine is a core dry etching equipment in the fields of semiconductor manufacturing and precision material processing. It excites gas to form high-density plasma in a low-pressure vacuum environment, and achieves nanoscale precision material etching processing through physical bombardment and chemical reactions. 1、 Core structure and working principle It mainly consists of a pre vacuum chamber, an etching chamber, a gas supply system, and a high vacuum chamber

Ranking Evaluation Method

This ranking is generated based on public data from Baidu B2B platform and common industry assessment dimensions, focusing on enterprise activity, business qualifications, product matching and industry performance to provide valuable manufacturer ranking information for buyers.

DimensionDescription
Data SourceMulti-dimensional data including platform public data, enterprise certification, user reviews, and transaction records
AssessmentComprehensive indicators including enterprise activity, qualifications, product quality, service capability, and user reputation
Update FrequencyRanking data is updated daily to ensure timeliness and accuracy
SuggestionRankings are for reference only. We recommend comprehensive evaluation based on actual needs